Muchina weLithography weMask Aligner Photo-Etching Machine
Sumo yechigadzirwa
Chiedza chinobuda nacho chinoshandisa UV LED inotengeswa kunze kwenyika uye module yekuumba chiedza, ine kupisa kudiki uye kugadzikana kwakanaka kwechiedza.
Chimiro chemwenje chakapindurwa chine simba rakanaka rekudzima kupisa uye simba rekudzima chiedza, uye kutsiva nekuchengetedza rambi remercury kuri nyore uye kuri nyore. Rakashongedzwa nemicroscope yebinocular dual field yakakura uye LCD ye 21 inch yakafara, inogona kurongeka nemaziso kuburikidza ne
eyepiece kana CCD + display, ine kunyatsorongeka kwakanyanya, maitiro akajeka uye kushanda kuri nyore.
Zvinhu zvirimo
Nebasa rekugadzirisa zvidimbu
Kuenzanisa kumanikidzwa kwekubatana kunoita kuti zvikwanisike kudzokorora kuburikidza ne sensor
Mukana wekuenderana uye mukana wekuratidzwa zvinogona kuiswa nedhijitari
Kushandisa kombiyuta yakavharirwa + kushanda kwechidzitiro chekubata, zviri nyore uye zviri nyore, zvakanaka uye zvine rupo
Dhonza mhando kumusoro nekudzika ndiro, iri nyore uye iri nyore
Tsigira kuratidzwa kwevacuum contact, kuratidzwa kwe hard contact, kuratidzwa kwe pressure contact uye kuratidzwa kwe closureness
Iine nano imprint interface basa
Kuratidzwa kwechikamu chimwe chete nekiyi imwe chete, mwero wepamusoro wekuita otomatiki
Muchina uyu wakavimbika uye wakakodzera kuratidzwa, wakakodzera kudzidzisa, kutsvagisa kwesainzi uye mafekitori mumakoreji nemayunivhesiti.
Mamwe mashoko
Tsanangudzo
1. Nzvimbo yekuratidzwa: 110mm × 110mm；
2. ★ Kureba kwehurefu hwemhepo: 365nm;
3. Kureba: ≤ 1m;
4. Kurongeka kwekugadzirisa: 0.8m;
5. Huwandu hwekufamba kwetafura yekuskena yesystem yekuenderana hunofanira kusvika pa: Y: 10mm;
6. Machubhu emwenje ekuruboshwe nekurudyi esystem yekururamisa magetsi anogona kufamba zvakasiyana munzira dze X, y neZ, nzira dze X: ± 5mm, nzira dze Y: ± 5mm uye nzira dze Z: ± 5mm;
7. Saizi yemasiki: 2.5 inches, 3 inches, 4 inches, 5 inches;
8. Saizi yemuenzaniso: chidimbu, 2 ", 3", 4 ";
9. ★ Yakakodzera ukobvu hwemuenzaniso: 0.5-6mm, uye inogona kutsigira zvidimbu zvemuenzaniso zve20mm zvakanyanya (zvakagadzirirwa);
10. Maitiro ekuratidza: nguva (maitiro ekuverenga pasi);
11. Kusafanana kwechiedza: ＜ 2.5%;
12. Maikorosikopu yeCCD yekurongeka kwenzvimbo mbiri: lenzi ye zoom (kamwe kusvika kashanu) + lenzi ye objective yemaikorosikopu;
13. Kufamba kwemasiki kana tichienzanisa nemuenzaniso kunofanira kusvika pa: X: 5mm; Y: 5mm; : 6º；
14. ★ Kuwanda kwesimba rekubuda: > 30MW / cm2,
15. ★ Nzvimbo yekurongeka uye nzvimbo yekubuda nayo zvinoshanda muzviteshi zviviri, uye mota mbiri dzezviteshi zveservo dzinochinja otomatiki;
16. Kuenzanisa kumanikidzwa kwekubata kunoita kuti zvidzokororwe kuburikidza ne sensor;
17. ★ Mukana wekuenderana uye mukana wekuratidzwa zvinogona kuiswa nedhijitari;
18. ★ Ine nano imprint interface uye proximity interface;
19. ★ Kushanda kwechidzitiro chekubata;
20. Chiyero chose: Inenge 1400mm (kureba) 900mm (upamhi) 1500mm (kureba).
